Channeling Contrast Microscopy of He implanted Diamond

> Diamond

1. 2.5x1017 0.6 MeV He/cm2 implant

2. 200x200 ?m scan c-RBS with 2.25 MeVH+

A: Dechanneling from lattice damage

B: Dechanneling from swelling

C: Unimplanted material

B

A

C

low

high

low

high

(x,E) tomography

Surface

He end of range

He signal

Cracking occurs and He escapes for:

ɮ.5x1017/cm2

AND

< 0.6 MeV

(Pressure > 10GPa)

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