Proton Induced X-ray Emission channeling P in diamond
> Diamond window implanted with 1x1015 4 MeV P/cm2 to 1.3 ?m
P concentration is about 18ppm at end of range
Focused laser annealing of damaged layer
Channeling with 1 MeV H+ confirms regrowth of matrix and ᡠ% lattice substitution of P
Electrical measurements show no n-type activity