Conclusions
Structural characterisation:
- Spatial resolution of for conventional IBA 0.4 ?m
- Elemental sensitivity with PIXE 10 ppm
- Depth resolution with RBS 50 nm
- Lattice location studies with ion channeling
Electrical characterisation
- Spatial resolution for IBIC 0.1 ?m
- Mapping of charge trapping an recombination centres
Hydrogen profiling with ERDA
Sub-trace optically active colour centres with luminescence
3D density and elemental mapping with tomography
Stay tuned for further developments......