Channeling Contrast Microscopy of He implanted Diamond
> Diamond
1. 2.5x1017 0.6 MeV He/cm2 implant
2. 200x200 ?m scan c-RBS with 2.25 MeVH+
A: Dechanneling from lattice damage
B: Dechanneling from swelling
C: Unimplanted material
B
A
C
low
high
low
high
(x,E) tomography
Surface
He end of range
He signal
Cracking occurs and He escapes for:
ɮ.5x1017/cm2
AND
< 0.6 MeV
(Pressure > 10GPa)
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