10 keV Ion Implanter  



A Colutron G2 ion gun installed in early 2001. Mounted on the preparation chamber of the JEOL AFM/STM, the implanter provides low energy beams of many species for the formation of shallow doped layers which can be imaged and studied in-situ with the AFM/STM system.


Created: 21 Feb, 2003
Last modified: 13 March 2003
Authorised by: Prof. David Jamieson
Maintained by: MARC office admin., Physics Department
Email: marcadm@physics.unimelb.edu.au